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"Closed-Loop Control of a Base XY Stage with Rotational Degree-of-Freedom ..."

Hemant Melkote, Farshad Khorrami (1999)

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DOI: 10.1109/ROBOT.1999.770372

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Hemant Melkote, Farshad Khorrami:
Closed-Loop Control of a Base XY Stage with Rotational Degree-of-Freedom for a High-Speed Ultra-Accurate Manufacturing System. ICRA 1999: 1812-1817

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