"Selective Anisotropic Dry Etching of Piezoelectric Silk Microstructures ..."

D. V. Santhosh Kumar Gunapu et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589957

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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D. V. Santhosh Kumar Gunapu, Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari:
Selective Anisotropic Dry Etching of Piezoelectric Silk Microstructures Using Oxygen Plasma Ashing. IEEE SENSORS 2018: 1-4

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