"The Impact of Silicon Concentration on the Reliability of Tungsten Silicide."

Liangshan Chen et al. (2025)

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DOI: 10.1109/IRPS48204.2025.10983465

access: closed

type: Conference or Workshop Paper

metadata version: 2025-06-04

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Liangshan Chen, Yinghong Zhao, Ki-Don Lee, Manisha Sharma, Joonah Yoon, Timothy Davis, Kayla N. Sanders, Myungsoo Yeo, Amado Longoria, Shou-Liang Zhang, Ju Kwang Kim, Dung Dau, Mukyeng Jung:
The Impact of Silicon Concentration on the Reliability of Tungsten Silicide. IRPS 2025: 5

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