"Copper Damascene Based Heterogeneous Integration of GaN with CMOS on 200 ..."

Jeffrey LaRoche, Lovelace Soirez, Eduardo Chumbes (2025)

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DOI: 10.1109/IRPS48204.2025.10983349

access: closed

type: Conference or Workshop Paper

metadata version: 2025-06-04

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Jeffrey LaRoche, Lovelace Soirez, Eduardo Chumbes:
Copper Damascene Based Heterogeneous Integration of GaN with CMOS on 200 mm Si Substrates (Invited). IRPS 2025: 1-4

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