"High-Resolution X-Ray Imaging of Controlled Microcrack Steering in BEoL ..."

Ehrenfried Zschech, Kristina Kutukova (2025)

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DOI: 10.1109/IRPS48204.2025.10983863

access: closed

type: Conference or Workshop Paper

metadata version: 2025-06-04

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Ehrenfried Zschech, Kristina Kutukova:
High-Resolution X-Ray Imaging of Controlled Microcrack Steering in BEoL Stacks (Invited). IRPS 2025: 1-6

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