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"Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC ..."
H.-S. Philip Wong et al. (2015)
- H.-S. Philip Wong, He Yi, Maryann C. Tung, Kye Okabe:
Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning. ISPD 2015: 65-66
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