"25.4 A Micromachined Heterogeneously Integrated Active-Probe Enabling ..."

Jesse Moody et al. (2025)

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DOI: 10.1109/ISSCC49661.2025.10904656

access: closed

type: Conference or Workshop Paper

metadata version: 2025-04-25

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Jesse Moody, Tyler Liebsch, Patrick Finnegan, Stefan Lepkowski, Robert Costanzo, Mieko Hirabayashi, Matt Jordan, Travis Forbes, Christopher Nordquist:
25.4 A Micromachined Heterogeneously Integrated Active-Probe Enabling Non-Disruptive In-Situ Measurements from DC to 50GHz. ISSCC 2025: 452-454

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