"Wafer Defect Pattern Classification with Explainable-Decision Tree Technique."

Ken Chau-Cheung Cheng et al. (2022)

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DOI: 10.1109/ITC50671.2022.00070

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Ken Chau-Cheung Cheng, Katherine Shu-Min Li, Sying-Jyan Wang, Andrew Yi-Ann Huang, Chen-Shiun Lee, Leon Li-Yang Chen, Peter Yi-Yu Liao, Nova Cheng-Yen Tsai:
Wafer Defect Pattern Classification with Explainable-Decision Tree Technique. ITC 2022: 549-553

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