"Investigation of CMOS Single Process Steps on 4H-SiC a-Plane Wafers for ..."

Jannik H. Schwarberg et al. (2024)

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DOI: 10.1109/MIPRO60963.2024.10569589

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Jannik H. Schwarberg, Robin Karhu, Birgit Kallinger, Mathias Rommel, Robin Schmidt, Jörg Schulze:
Investigation of CMOS Single Process Steps on 4H-SiC a-Plane Wafers for Quantum Applications. MIPRO 2024: 1566-1572

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