"Diffraction angle prediction of surface micromachined planar curved ..."

Kuan-Yu Chen, Ju-Nan Kuo (2009)

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DOI: 10.1109/NEMS.2009.5068596

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Kuan-Yu Chen, Ju-Nan Kuo:
Diffraction angle prediction of surface micromachined planar curved grating and crossed grating. NEMS 2009: 363-366

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