"Influence of post-annealing on the mechanical and electrical properties of ..."

J. N. Ding et al. (2009)

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DOI: 10.1109/NEMS.2009.5068607

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/nems/DingQYHC09
J. N. Ding, H. S. Qi, N. Y. Yuan, Y. L. He, G. G. Cheng:
Influence of post-annealing on the mechanical and electrical properties of boron-doped nanocrystalline silicon thin films. NEMS 2009: 413-415

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