"CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer."

Yuntao Liu et al. (2009)

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DOI: 10.1109/NEMS.2009.5068630

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Yuntao Liu, Xiaowei Liu, Liang Yin, Weiping Chen, Qun Wu:
CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer. NEMS 2009: 510-513

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