"Design of a novel MEMS IDT dual axes surface acoustic wave gyroscope."

Qinghui Liu et al. (2009)

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DOI: 10.1109/NEMS.2009.5068717

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Qinghui Liu, Xuezhong Wu, Di Di, Peitao Dong, Dapeng Fan:
Design of a novel MEMS IDT dual axes surface acoustic wave gyroscope. NEMS 2009: 889-892

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