"Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer."

Tan D. Tran et al. (2009)

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DOI: 10.1109/NEMS.2009.5068538

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/nems/TranNNHN09
Tan D. Tran, Minh D. Nguyen, Long T. Nguyen, Tue Huu Huynh, Thuy P. Nguyen:
Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer. NEMS 2009: 112-115

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