"Trilayer nanoimprint fabrication and simulation of the silicon nanowire ..."

Jing Wan et al. (2009)

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DOI: 10.1109/NEMS.2009.5068745

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Jing Wan, Shao-Ren Deng, Yifang Chen, Ejaz Huq, Ran Liu, Xin-Ping Qu:
Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection. NEMS 2009: 1013-1016

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