"Micromachined interferometric accelerometer fabricated using SGADER process."

Kang Wu et al. (2009)

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DOI: 10.1109/NEMS.2009.5068755

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/nems/WuYCLGZ09
Kang Wu, Xiongying Ye, Feng Chen, Litao Liu, Linrui Guo, Zhaoying Zhou:
Micromachined interferometric accelerometer fabricated using SGADER process. NEMS 2009: 1058-1061

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