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"Analyzing the frequency response of micromachined capacitive inertial ..."

Dingbang Xiao et al. (2009)

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DOI: 10.1109/NEMS.2009.5068591

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - conf/nems/XiaoXHWL09
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  - https://dblp.org/rec/conf/nems/XiaoXHWL09
Dingbang Xiao, Liqiang Xie, Zhanqiang Hou, Xuezhong Wu, Shengyi Li:
Analyzing the frequency response of micromachined capacitive inertial devices by the third harmonic detection. NEMS 2009: 339-342

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