"Robust Control of a Two-Degree-of-Freedom Flexure-Based Nanopositioner for ..."

Zilong Cheng et al. (2021)

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DOI: 10.1109/SMC52423.2021.9658782

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-31

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Zilong Cheng, Jun Ma, Wenxin Wang, Xiaoxue Zhang, Xiaolong Chen, Xiaocong Li, Haiyue Zhu, Tong Heng Lee:
Robust Control of a Two-Degree-of-Freedom Flexure-Based Nanopositioner for Planar Scanning Tasks. SMC 2021: 498-503

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