"Modeling and performance analysis of semiconductor manufacturing systems."

MuDer Jeng, Xiaolan Xie (1998)

> Home

Details and statistics

DOI: 10.1109/ICSMC.1998.725487

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/smc/JengX98a
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/smc/JengX98a
MuDer Jeng, Xiaolan Xie:
Modeling and performance analysis of semiconductor manufacturing systems. SMC 1998: 650-655

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.