"Polar Axis Orientation Control of Hafnium-Based Ferroelectric Capacitors ..."

Zhaomeng Gao et al. (2024)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46783.2024.10631432

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type: Conference or Workshop Paper

metadata version: 2024-10-17

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Zhaomeng Gao, Tianjiao Xin, D. Kai, Qiwendong Zhao, Yiwei Wang, Cheng Liu, Yilin Xu, Rui Wang, Guangjie Shi, Yunzhe Zheng, Yonghui Zheng, Yan Cheng, Hangbing Lyu:
Polar Axis Orientation Control of Hafnium-Based Ferroelectric Capacitors with in-Situ AC Electric Bias During Rapid Thermal Annealing. VLSI Technology and Circuits 2024: 1-2

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