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"Markovian timed Petri nets for performance analysis of semiconductor ..."

MuDer Jeng, Xiaolan Xie, WenYuan Hung (2000)

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DOI: 10.1109/3477.875450

access: closed

type: Journal Article

metadata version: 2020-05-30

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MuDer Jeng, Xiaolan Xie, WenYuan Hung:
Markovian timed Petri nets for performance analysis of semiconductor manufacturing systems. IEEE Trans. Syst. Man Cybern. Part B 30(5): 757-771 (2000)

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