"A new pre-alignment approach based on Four-Quadrant-Photo-Detector for IC ..."

Yun Liu, De Xu, Min Tan (2007)

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DOI: 10.1007/S11633-007-0208-Z

access: closed

type: Journal Article

metadata version: 2020-08-20

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Yun Liu, De Xu, Min Tan:
A new pre-alignment approach based on Four-Quadrant-Photo-Detector for IC mask. Int. J. Autom. Comput. 4(2): 208-216 (2007)

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