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"A monolithic surface micromachined accelerometer with digital output."

Crist Lu, Mark Lemkin, Bernhard E. Boser (1995)

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DOI: 10.1109/4.482163

access: closed

type: Journal Article

metadata version: 2023-05-03

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Crist Lu, Mark Lemkin, Bernhard E. Boser:
A monolithic surface micromachined accelerometer with digital output. IEEE J. Solid State Circuits 30(12): 1367-1373 (1995)

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