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ORCID"Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS ..."
Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai (2015)
- Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai
:
Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology. Micromachines 6(11): 1645-1654 (2015)
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