"Analysis and prevention of convex corner undercutting in bulk ..."

Kanishka Biswas, Soumen K. Das, S. Kal (2006)

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DOI: 10.1016/J.MEJO.2005.10.010

access: closed

type: Journal Article

metadata version: 2023-09-30

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Kanishka Biswas, Soumen K. Das, S. Kal:
Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures. Microelectron. J. 37(8): 765-769 (2006)

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