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"Etch characteristics of KOH, TMAH and dual doped TMAH for bulk ..."
Kanishka Biswas, S. Kal (2006)
- Kanishka Biswas, S. Kal:
Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. Microelectron. J. 37(6): 519-525 (2006)
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