"Titanium nitride electrodes for micro-gap discharge."

Chung-Fon Hsieh, Shyankay Jou (2006)

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DOI: 10.1016/J.MEJO.2006.03.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chung-Fon Hsieh, Shyankay Jou:
Titanium nitride electrodes for micro-gap discharge. Microelectron. J. 37(9): 867-870 (2006)

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