"Reinforcement of a PDMS master using an oxide-coated silicon plate."

Cheng Luo et al. (2006)

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DOI: 10.1016/J.MEJO.2005.06.012

access: closed

type: Journal Article

metadata version: 2020-02-22

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Cheng Luo, Fang Meng, Xinchuan Liu, Yiyun Guo:
Reinforcement of a PDMS master using an oxide-coated silicon plate. Microelectron. J. 37(1): 5-11 (2006)

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