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"Reliability of the doping concentration in an ultra-thin body and buried ..."

Wen-Teng Chang, Chun-Ming Lai, Wen-Kuan Yeh (2014)

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DOI: 10.1016/J.MICROREL.2013.10.012

access: closed

type: Journal Article

metadata version: 2020-02-22

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Wen-Teng Chang, Chun-Ming Lai, Wen-Kuan Yeh:
Reliability of the doping concentration in an ultra-thin body and buried oxide silicon on insulator (SOI) and comparison with a partially depleted SOI. Microelectron. Reliab. 54(2): 485-489 (2014)

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