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"Investigation of stress in shallow trench isolation using UV micro-Raman ..."

Kai F. Dombrowski et al. (2001)

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DOI: 10.1016/S0026-2714(00)00260-2

access: closed

type: Journal Article

metadata version: 2020-02-22

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Kai F. Dombrowski, B. Dietrich, Ingrid De Wolf, R. Rooyackers, G. Badenes:
Investigation of stress in shallow trench isolation using UV micro-Raman spectroscopy. Microelectron. Reliab. 41(4): 511-515 (2001)

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