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"Electrical characterization of hafnium oxide and hafnium-rich silicate ..."
Salvador Dueñas et al. (2005)
- Salvador Dueñas
, Helena Castán
, Héctor García
, J. Barbolla, Kaupo Kukli
, Jaan Aarik
, Mikko Ritala
, Markku Leskelä
:
Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition. Microelectron. Reliab. 45(5-6): 949-952 (2005)
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