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"Characterising the surface roughness of AFM grown SiO₂ on Si."

Daniel Hill et al. (2001)

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DOI: 10.1016/S0026-2714(01)00078-6

access: closed

type: Journal Article

metadata version: 2020-07-14

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Daniel Hill, X. Blasco, Marc Porti, Montserrat Nafría, Xavier Aymerich:
Characterising the surface roughness of AFM grown SiO₂ on Si. Microelectron. Reliab. 41(7): 1077-1079 (2001)

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