"μ-Raman spectroscopy for stress analysis in high power silicon devices."

Thierry Kociniewski, Jeff Moussodji, Zoubir Khatir (2014)

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DOI: 10.1016/J.MICROREL.2014.07.149

access: closed

type: Journal Article

metadata version: 2020-02-22

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Thierry Kociniewski, Jeff Moussodji, Zoubir Khatir:
μ-Raman spectroscopy for stress analysis in high power silicon devices. Microelectron. Reliab. 54(9-10): 1770-1773 (2014)

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