"Layout dependency induced deviation from Poisson area scaling in BEOL ..."

Yunlong Li et al. (2005)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2005.07.010

access: closed

type: Journal Article

metadata version: 2024-08-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/LiTRGM05
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/LiTRGM05
Yunlong Li, Zsolt Tökei, Philippe Roussel, Guido Groeseneken, Karen Maex:
Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability. Microelectron. Reliab. 45(9-11): 1299-1304 (2005)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.