"Optical and electrical characterization of the electron beam gun ..."

V. Mikhelashvili, Gadi Eisenstein (2001)

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DOI: 10.1016/S0026-2714(01)00075-0

access: closed

type: Journal Article

metadata version: 2020-02-22

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V. Mikhelashvili, Gadi Eisenstein:
Optical and electrical characterization of the electron beam gun evaporated TiO₂ film. Microelectron. Reliab. 41(7): 1057-1061 (2001)

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