"Developments of new concept analytical instruments for failure analyses of ..."

Yasuhiro Mitsui et al. (2001)

> Home

Details and statistics

DOI: 10.1016/S0026-2714(01)00105-6

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/MitsuiYKSA01
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/MitsuiYKSA01
Yasuhiro Mitsui, Fumiko Yano, Hiroshi Kakibayashi, Hiroyasu Shichi, Takashi Aoyama:
Developments of new concept analytical instruments for failure analyses of sub-100 nm devices. Microelectron. Reliab. 41(8): 1171-1183 (2001)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.