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"Stress impact of moisture diffusion measured with the stress chip."

F. Schindler-Saefkow et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.02.022

access: closed

type: Journal Article

metadata version: 2024-03-20

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  - journals/mr/Schindler-SaefkowROPMWMRK14
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  - https://dblp.org/rec/journals/mr/Schindler-SaefkowROPMWMRK14
F. Schindler-Saefkow, F. Rost, Alexander Otto, R. Pantou, Raul Mroßko, Bernhard Wunderle, Bernd Michel, Sven Rzepka, J. Keller:
Stress impact of moisture diffusion measured with the stress chip. Microelectron. Reliab. 54(6-7): 1243-1252 (2014)

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