"Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films."

M. Serényi et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.02.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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M. Serényi, J. Betko, Ákos Nemcsics, N. Q. Khanh, D. K. Basa, M. Morvic:
Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films. Microelectron. Reliab. 45(7-8): 1252-1256 (2005)

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