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"The influence of electron-beam irradiation on electrical characteristics ..."
P. Thangadurai et al. (2009)
- P. Thangadurai, W. D. Kaplan, V. Mikhelashvili, Gadi Eisenstein:
The influence of electron-beam irradiation on electrical characteristics of metal-insulator-semiconductor capacitors based on a high-k dielectric stack of HfTiSiO(N) and HfTiO(N) layers. Microelectron. Reliab. 49(7): 716-720 (2009)
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