"Stress analyses of high spatial resolution on TSV and BEoL structures."

Dietmar Vogel et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.098

access: closed

type: Journal Article

metadata version: 2022-10-02

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Dietmar Vogel, Ellen Auerswald, Jürgen Auersperg, Parisa Bayat, Raul D. Rodriguez, Dietrich R. T. Zahn, Sven Rzepka, Bernd Michel:
Stress analyses of high spatial resolution on TSV and BEoL structures. Microelectron. Reliab. 54(9-10): 1963-1968 (2014)

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