"Mechanical Reliability of MEMS-structures under shock load."

Ulrich Wagner et al. (2001)

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DOI: 10.1016/S0026-2714(01)00173-1

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ulrich Wagner, J. Franz, M. Schweiker, Winfried Bernhard, Roland Müller-Fiedler, Bernd Michel, Oliver Paul:
Mechanical Reliability of MEMS-structures under shock load. Microelectron. Reliab. 41(9-10): 1657-1662 (2001)

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