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"Effects of periphery encapsulation material on the characteristics of ..."

Oi-Ying Wong et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.02.022

access: closed

type: Journal Article

metadata version: 2020-02-22

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Oi-Ying Wong, Wing-Shan Tam, Oi-Kan Shea, Shiu Hung Cheung, Jun Liu, Chi-Wah Kok, Hei Wong:
Effects of periphery encapsulation material on the characteristics of micro vacuum dielectric capacitor. Microelectron. Reliab. 49(5): 506-509 (2009)

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