"Application of nanoindentation technique for investigation of ..."

Artur Wymyslowski, Lukasz Dowhan (2013)

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DOI: 10.1016/J.MICROREL.2012.10.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Artur Wymyslowski, Lukasz Dowhan:
Application of nanoindentation technique for investigation of elasto-plastic properties of the selected thin film materials. Microelectron. Reliab. 53(3): 443-451 (2013)

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