"Dielectric charging in silicon nitride films for MEMS capacitive switches: ..."

Usama Zaghloul et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.07.006

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type: Journal Article

metadata version: 2024-08-04

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Usama Zaghloul, George J. Papaioannou, Fabio Coccetti, Patrick Pons, Robert Plana:
Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions. Microelectron. Reliab. 49(9-11): 1309-1314 (2009)

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