"Application of Fast Laser Deprocessing Techniques on large cross-sectional ..."

Yuzhe Zhao et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.060

access: closed

type: Journal Article

metadata version: 2022-03-23

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Yuzhe Zhao, Q. J. Wang, Pik Kee Tan, Huei Hao Yap, Binghai Liu, H. Feng, Hao Tan, Ran He, Y. M. Huang, D. D. Wang, Lei Zhu, C. Q. Chen, Francis Rivai, Jeffrey Lam, Zhihong Mai:
Application of Fast Laser Deprocessing Techniques on large cross-sectional view area sample with FIB-SEM dual beam system. Microelectron. Reliab. 64: 362-366 (2016)

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