"Essential SMSs: developing a service management scheme for semiconductor ..."

Fan-Tien Cheng, Haw Ching Yang, Chia-Ying Tsai (2004)

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DOI: 10.1109/MRA.2004.1275961

access: closed

type: Journal Article

metadata version: 2020-05-18

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Fan-Tien Cheng, Haw Ching Yang, Chia-Ying Tsai:
Essential SMSs: developing a service management scheme for semiconductor factory management systems. IEEE Robotics Autom. Mag. 11(1): 26-40 (2004)

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