"Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster ..."

Hyun-Jung Kim, Jun-Ho Lee (2019)

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DOI: 10.1109/TASE.2018.2874664

access: closed

type: Journal Article

metadata version: 2025-01-19

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Hyun-Jung Kim, Jun-Ho Lee:
Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules. IEEE Trans Autom. Sci. Eng. 16(2): 898-907 (2019)

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