"High Performance Lithography Hotspot Detection With Successively Refined ..."

Duo Ding, J. Andres Torres, David Z. Pan (2011)

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DOI: 10.1109/TCAD.2011.2164537

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type: Journal Article

metadata version: 2020-09-24

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Duo Ding, J. Andres Torres, David Z. Pan:
High Performance Lithography Hotspot Detection With Successively Refined Pattern Identifications and Machine Learning. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 30(11): 1621-1634 (2011)

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