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"Process modeling and simulation: boundary conditions for point ..."

Kenji Taniguchi, Yoshiaki Shibata, Chihiro Hamaguchi (1990)

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DOI: 10.1109/43.62754

access: closed

type: Journal Article

metadata version: 2020-09-24

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Kenji Taniguchi, Yoshiaki Shibata, Chihiro Hamaguchi:
Process modeling and simulation: boundary conditions for point defect-based impurity diffusion model. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 9(11): 1177-1183 (1990)

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