"Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners."

Ali Bazaei et al. (2016)

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DOI: 10.1109/TCST.2015.2508979

access: closed

type: Journal Article

metadata version: 2020-06-15

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Ali Bazaei, Mohammad Maroufi, Anthony G. Fowler, S. O. Reza Moheimani:
Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners. IEEE Trans. Control. Syst. Technol. 24(5): 1717-1728 (2016)

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